The function of a 60-nm-thick AlN buffer layer in n-ZnO/AlN/p-Si(111)
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منابع مشابه
The function of a 60-nm-thick AlN buffer layer in n-ZnO/AlN/p-Si(111)
ZnO films were prepared on p-Si (111) substrates by using atomic layer deposition. High-resolution x-ray diffraction (XRD), scanning electron microscopy (SEM), x-ray photoelectron spectroscopy (XPS), photoluminescence (PL), and I-V measurements were carried out to characterize structural, electrical, and optical properties. After introducing a 60-nm-thick AlN buffer layer, the growth direction ...
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ژورنال
عنوان ژورنال: Nanoscale Research Letters
سال: 2015
ISSN: 1556-276X
DOI: 10.1186/s11671-015-0809-3